Print Icon Electron Microprobe

Electron Microprobe Laboratory is located at AMD, HQ, Hyderabad and equipped with Electron Probe Micro Analyser (EPMA) Model SX-100 manufactured by M/S. Cameca,France. This instrument is equipped with high vacuum system, versatile electron gun compatible with W and LaB6, three vertical and one inclined Wavelength Dispersive Spectrometers, built-in microscopy tools that allow simultaneous X-ray, SEM and BSE imaging and sophisticated visible light optics to provide very flexible sample inspection with wide range image magnification. The excitation beam regulation system and automated sample stage movements provide outstanding stability and measurement repeatability.


The Laboratory undertakes micro-domain near-surface qualitative and quantitative chemical analysis from B to U with a general detection limit of 100ppm. Detailed morphological, textural and compositional (qualitative) data are obtained through SE, BSE, X-ray images and spectral scans.